Standard ion sources

N	Parameter	Model
N	Parameter	KLAN-23M	KLAN-52M	KLAN-53M	KLAN-54M	KLAN-103M	KLAN-104M	KLAN-105M	KLAN-163M
1.	Ion source type	with cold hollow cathode	with filament cathode	with cold hollow cathode	radiofrequency 13.56 MHz	with filament cathode	with cold hollow cathode	radiofrequency 13.56 MHz	radiofrequency 13.56 MHz
2.	Operating gases	inert, N₂, O₂ mixtures, etc.	inert, N₂, H₂	inert, N₂, O₂ mixtures, etc.	inert, N₂, O₂, C₂H ₈, etc.	inert, N₂, H₂	inert, N₂, O ₂ mixtures, etc.	inert, N₂, O ₂, C₂H₈, etc.	inert, N₂, O ₂, C₂H₈, etc.
3.	Output diameter of ion beam	2 cm	5 cm			10 cm			16 cm
4.	Ion energy	50 - 1500 eV
5.	Ion beam	up to 20 mA	up to 100 mA			up to 300 mA			up to 400 mA
6.	Gas flow rate	2 - 3 sccm	2 - 4 sccm	3 - 7 sccm	6 - 10 sccm	4 - 8 sccm	5 - 10 sccm	6 - 15 sccm	12 - 18 sccm
7.	Operating pressure	not more than (2-4) 10 ^-2 Па
8.	Cooling	yes	no	yes	yes	no	yes	yes	yes
9.	Ion optics	two-grid, three-grid, flat, focused, defocused, material - molybdenum, titanium
10.	Cathode-neutralizer	filament immersed (not immersed) (other types – on special order)
11.	External diameter	62 mm	100 mm			150 mm			232 mm

- Platar Co., Ltd. -
STANDARD ION SOURCES
	Platar Co., Ltd. produces standard ion sources of KLAN-series The equipment is not expensive and intended for a wide range of users. Ion sources may be supplied with additional spare parts (ion optics assemblies, discharge chambers, anodes, cathodes, insulators, etc.). This provides, in particular, a possibility of fast replacement of parts (at ion source’s cleaning, for instance). Besides, a presence of some ion optics with different grids allows to obtain ion beams with various parameters and to use same ion source for many applications (etching, deposition, assisting, cleaning, etc.).